Integrated scatter plate and projection lens for scatter plate interferometer
作者:
Jari T. Ra¨sa¨nen,
Kai-Erik Peiponen,
Kazi Monowar Abedin,
Koji Tenjimbayashi,
Tomoaki Eiju,
Kiyofumi Matsuda,
期刊:
Review of Scientific Instruments
(AIP Available online 1998)
卷期:
Volume 69,
issue 4
页码: 1587-1590
ISSN:0034-6748
年代: 1998
DOI:10.1063/1.1148813
出版商: AIP
数据来源: AIP
摘要:
Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using thee-beam lithography method. We present experimental verification and some computer simulation results. ©1998 American Institute of Physics.
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