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Integrated scatter plate and projection lens for scatter plate interferometer

 

作者: Jari T. Ra¨sa¨nen,   Kai-Erik Peiponen,   Kazi Monowar Abedin,   Koji Tenjimbayashi,   Tomoaki Eiju,   Kiyofumi Matsuda,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1998)
卷期: Volume 69, issue 4  

页码: 1587-1590

 

ISSN:0034-6748

 

年代: 1998

 

DOI:10.1063/1.1148813

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using thee-beam lithography method. We present experimental verification and some computer simulation results. ©1998 American Institute of Physics.

 

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