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Effect ofCH4on the electron emission characteristics of active molybdenum field emitter arrays

 

作者: Babu R. Chalamala,   Robert M. Wallace,   Bruce E. Gnade,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1998）
卷期: Volume 16, issue 6  

页码: 3073-3076

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.590444

 

出版商: American Vacuum Society

 

关键词: Mo

 

数据来源: AIP

 

摘要:

Exposing active Spindt-type molybdenum field emission microcathode arrays toCH4resulted in increased electron emission. Exposures of 250 and 2500 L result in electron emission enhancement of106.2±41.0%and200.1±20.7%and a decrease in tip work function by10.2±5.6%and17.6±1.7%,respectively. The measured work function changes indicate the formation of molybdenum carbides on the field emitter tips.

 

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