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Identification and visualization of questionable regions in atomic force microscope images

 

作者: Edward C. W. Leung,   Peter Markiewicz,   M. Cynthia Goh,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1997)
卷期: Volume 15, issue 2  

页码: 181-185

 

ISSN:1071-1023

 

年代: 1997

 

DOI:10.1116/1.589261

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

An algorithm for the identification of areas that do not necessarily represent the true sample surface in atomic force microscope images is presented. These areas describe regions of the surface which might not have made contact with the probe tip during a raster scan, giving data which should be deemed questionable. Through the identification of these questionable data points, a more accurate picture of the sample can be obtained. The procedure is applied to several atomic force microscope images for the improvement of sample images and for obtaining tip information. While the algorithm is applicable to all such images, its sensitivity to noise reflects shortcomings in the assumption made in deconvolution.

 

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