p‐njunction diodes in InP and In1−xGaxAsyP1−yfabricated by beryllium‐ion implantation
作者:
C. A. Armiento,
J. P. Donnelly,
S. H. Groves,
期刊:
Applied Physics Letters
(AIP Available online 1979)
卷期:
Volume 34,
issue 3
页码: 229-231
ISSN:0003-6951
年代: 1979
DOI:10.1063/1.90740
出版商: AIP
数据来源: AIP
摘要:
Mesa and planar InPp‐njunction diodes have been fabricated by beryllium‐ion implantation. These devices exhibit abrupt reverse‐bias breakdowns and low leakage currents. Similar mesa diodes have been produced in In1−xGaxAsyP1−y(Eg≈1.0 eV). Diodes operated in the punch‐through mode exhibited uniform breakdown over the area of the device, without any apparent edge effects.
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