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Dissociation kinetics of hydrogen‐passivated (100) Si/SiO2interface defects

 

作者: J. H. Stathis,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 77, issue 12  

页码: 6205-6207

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.359148

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The activation energy for thermal dissociation of hydrogen from silicon dangling‐bond defects (Pbcenters) has been measured using both (111)‐ and (100)‐oriented samples. The behavior of each of the threePbvarieties [P111bat the (111) interface,P100b0andP100b1at the (100) interface] is compared. ForP111b, excellent agreement with previous results by Brower [Phys. Rev. B42, 3444 (1990)] is obtained. The activation energies of the (100)‐interfacePbcenters are slightly higher, assuming the same vibrational frequency, and, unlike that ofP111b, are affected by a postoxidation anneal. ©1995 American Institute of Physics.

 

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