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Internal Investigation of Microchannel Plates by Scanning Electron Microscopy

 

作者: R. Polaert,   J. Rodie`re,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1973)
卷期: Volume 44, issue 10  

页码: 1531-1536

 

ISSN:0034-6748

 

年代: 1973

 

DOI:10.1063/1.1685992

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new method for investigating microchannel plate quality is described. The microchannel plate is operated with an applied voltage, either with normal or reverse polarization. Without any polarization, the scanning electron microscope takes a picture only of the external flat face. With a reverse voltage, the secondary electrons may be collected from the full depth of the channel and give a clear and bright picture of the internal surface of the channel. With normal polarization, the secondary electrons are multiplied through the plate and give the image of the electron gain of each individual channel. This use of the SEM is therefore very helpful for studying the quality of the microchannel array.

 

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