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Crystalline diamond growth in thin films deposited from a CH4/Ar rf plasma

 

作者: Gehan Amaratunga,   Andrew Putnis,   Kim Clay,   William Milne,  

 

期刊: Applied Physics Letters  （AIP Available online 1989）
卷期: Volume 55, issue 7  

页码: 634-635

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101808

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Observation of single‐crystal diamond growth in thin films obtained from the rf decomposition of a CH4/Ar plasma is reported. The films were deposited on Si substrates which were kept at 20 °C. Polycrystalline diamond grains are seen over the entire film. Single‐crystal diffraction patterns obtained from larger grains all show {111} twinning.

 

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