Processing of multilayer PZT coatings for device purposes
作者:
T. Olding,
B. Leclerc,
M. Sayer,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 26,
issue 1-4
页码: 225-241
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908215624
出版商: Taylor & Francis Group
关键词: PZT;lead zirconate titanate;acetic acid;sol-gel
数据来源: Taylor
摘要:
A stable solution chemistry and a consistent thermal processing route have been developed to produce multi-layer sol-gel lead zirconate titanate (PZT) piezoelectric coatings of high electrical quality. Up to 5 μm thick fully perovskite and piezoelectrically active crack-free coatings with permittivity of 1100–1300 and loss tangents of 1–2% can be produced with careful attention to the choice of titanium and zirconium alkoxide precursors, the choice of solvent, the method of solution preparation, and the thermal processing schedule. The films were deposited on platinized silicon, spinning for 30 seconds at 3000 rpm. Individual layers were dried on a hot plate at 250°C for 30 seconds, fired on a second hot plate at 400°C for 15–60 seconds and annealed in a box furnace at 650°C for 2 minutes. Applications of the films are directed toward piezoelectric transformers, surface acoustic wave devices, and cantilever structures.
点击下载:
PDF (663KB)
返 回