Electron-Beam Fabrication
作者:
A. N. Broers,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1971)
卷期:
Volume 8,
issue 5
页码: 50-51
ISSN:0022-5355
年代: 1971
DOI:10.1116/1.1316389
出版商: American Vacuum Society
数据来源: AIP
摘要:
Electron-beam fabrication techniques are becoming of increasing interest as thin-film electronic devices get smaller and the need for quick turn-around in their fabrication becomes more important. This short paper outlines the current state of electron-beam fabrication technology and indicates some of the areas where it has been employed successfully.
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