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Electron-Beam Fabrication

 

作者: A. N. Broers,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1971)
卷期: Volume 8, issue 5  

页码: 50-51

 

ISSN:0022-5355

 

年代: 1971

 

DOI:10.1116/1.1316389

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

Electron-beam fabrication techniques are becoming of increasing interest as thin-film electronic devices get smaller and the need for quick turn-around in their fabrication becomes more important. This short paper outlines the current state of electron-beam fabrication technology and indicates some of the areas where it has been employed successfully.

 

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