Preprocessing of data from spreading-resistance measurements
作者:
J.van Linschoten,
J.Snijder,
M.W.Hillen,
期刊:
IEE Proceedings I (Solid-State and Electron Devices)
(IET Available online 1980)
卷期:
Volume 127,
issue 2
页码: 100-104
年代: 1980
DOI:10.1049/ip-i-1.1980.0019
出版商: IEE
数据来源: IET
摘要:
Spreading-resistance measurements often exhibit a lot of noise which can hinder their analysis. A method is presented for automated elimination of strongly deviating values, and smoothing of the resistance curve, leading in a few filter steps to a more accurate determination of the concentration profile. It is shown that the accuracy of the spreading-resistance technique can be increased by combining several profiles of a sample.
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