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Influence of indium doping on AlGaAs layers grown by molecular beam epitaxy

 

作者: K. H. Chang,   C. P. Lee,   J. S. Wu,   D. G. Liu,   D. C. Liou,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 57, issue 16  

页码: 1640-1642

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.104073

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Influence of indium doping on the qualities of AlGaAs layers grown by molecular beam epitaxy has been studied. It was found that a proper amount of In doping can increase the photoluminescence intensity drastically by a factor greater than 10 indicating an improvement in the optical quality of AlGaAs epilayers. The improvement in the material quality is attributed to a higher surface migration rate of In atoms than those of Ga and Al atoms leading to a reduction of group III vacancies. However, too great a concentration of In atoms leads to effects that may degrade the film quality.

 

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