High‐Coercive‐Force Rare‐Earth Alloy Films by Getter Sputtering
作者:
H. C. Theuerer,
E. A. Nesbitt,
D. D. Bacon,
期刊:
Journal of Applied Physics
(AIP Available online 1969)
卷期:
Volume 40,
issue 7
页码: 2994-2996
ISSN:0021-8979
年代: 1969
DOI:10.1063/1.1658112
出版商: AIP
数据来源: AIP
摘要:
Thin films of the rare‐earth alloys of the Co&sngbnd;Sm system with and without the addition of Cu have been found to have exceptionally high coercive forces. A coercive force of 30 000 Oe was realized with Co3.65Cu1.35Sm films, 4000‐Å thick prepared at a substrate temperature of 500°C using getter sputtering. This technique avoids troublesome oxidation problems usually encountered in preparing films of active materials such as the rare‐earth compounds.
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