Study of buried silicon nitride layers synthesized by ion implantation
作者:
P. Bourguet,
J. M. Dupart,
E. Le Tiran,
P. Auvray,
A. Guivarc’h,
M. Salvi,
G. Pelous,
P. Henoc,
期刊:
Journal of Applied Physics
(AIP Available online 1980)
卷期:
Volume 51,
issue 12
页码: 6169-6175
ISSN:0021-8979
年代: 1980
DOI:10.1063/1.327649
出版商: AIP
数据来源: AIP
摘要:
The formation of buried layers of silicon nitride by nitrogen‐ion implantation in single‐crystal silicon is studied. He+backscattering, x‐ray diffraction, scanning and transmission electron microscopies, and infrared absorption measurements were used for the physico‐chemical characterization; sheet resistivity determination, spreading‐resistance profile, and current‐voltage characteristics for the electrical characterization. It is shown that, for 180‐keV nitrogen ions, a fluence about 1018N/cm2must be implanted in order to obtain a continuous layer of silicon nitride and that annealing must be performed at 1200 °C to make it homogeneous and electrically insulating. The Si3N4layer obtained crystallizes in the &agr; phase and presents properties nearly similar to those of deposited layers. It is demonstrated that the conditions of implantation (energy, substrate temperature, beam intensity) play a fundamental role in the structure of the superficial silicon layer: the substrate must not be amorphized up to the surface during the implantation to obtain, after annealing, a monocrystalline surface layer suitable, for instance, for further epitaxy.
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