Cold-Cathode Magnetron Gauge Characteristics
作者:
Paul J. Bryant,
William W. Longley,
Charles M. Gosselin,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1966)
卷期:
Volume 3,
issue 2
页码: 62-67
ISSN:0022-5355
年代: 1966
DOI:10.1116/1.1492454
出版商: American Vacuum Society
数据来源: AIP
摘要:
A description of cold cathode magnetrons operating as gauges has been developed in terms of the conditions for establishing a discharge and the effects of space-charge buildup. Pressure response curves for NRC type 552 (Redhead) and GCA model 1410 (Kreisman) gauges were determined by a conductance-regulated, pressure-ratio method using Bayard–Alpert type gauges for upstream pressure reference. Four characteristics of normal magnetrons operated below cutoff are predicted from the discharge mechanism and correlated with test data: (1) an out-of-strike state characterized by a steady pressure-independent gauge reading (about5×10−14Torr) due to leakage current; (2) a minimum pressure threshold for operation,2.7×10−12Torr for the NRC 552,1.7×10−10Torr for the GCA 1410; (3) a range (below10−9Torr) of nonlinear pressure-dependent response moderated by space charge buildup; and (4) a range of near linear response corresponding to the region of nearly saturated space charge.
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