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Cold-Cathode Magnetron Gauge Characteristics

 

作者: Paul J. Bryant,   William W. Longley,   Charles M. Gosselin,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1966)
卷期: Volume 3, issue 2  

页码: 62-67

 

ISSN:0022-5355

 

年代: 1966

 

DOI:10.1116/1.1492454

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

A description of cold cathode magnetrons operating as gauges has been developed in terms of the conditions for establishing a discharge and the effects of space-charge buildup. Pressure response curves for NRC type 552 (Redhead) and GCA model 1410 (Kreisman) gauges were determined by a conductance-regulated, pressure-ratio method using Bayard–Alpert type gauges for upstream pressure reference. Four characteristics of normal magnetrons operated below cutoff are predicted from the discharge mechanism and correlated with test data: (1) an out-of-strike state characterized by a steady pressure-independent gauge reading (about5×10−14Torr) due to leakage current; (2) a minimum pressure threshold for operation,2.7×10−12Torr for the NRC 552,1.7×10−10Torr for the GCA 1410; (3) a range (below10−9Torr) of nonlinear pressure-dependent response moderated by space charge buildup; and (4) a range of near linear response corresponding to the region of nearly saturated space charge.

 

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