Biaxially aligned praseodymium oxide(Pr6O11)thin films were prepared by ion-beam assisted laser deposition on mechanically polished metal alloy substrates. A low divergence rf plasma source was used as an assisting source. Deposited films showed (001) oriented film growth with a strong biaxial alignment in the film plane. The degree of in-plane orientation dependent on ion-to-atom ratio and ion bombardment angle was studied. Planar ion channeling along the {110} planes is used to explain the observed alignment features. At an ion-to-atom ratio of 0.17 and an ion incident angle of 60°, in-plane orientations of 16° full width at half-maximum were obtained. Due to the low lattice mismatch (0.3&percent;) toYBa2Cu3Oxfilms, the material could be an alternative to theYSZ/CeO2buffer layer system currently used for high critical current carrying superconducting tapes. ©1997 American Institute of Physics.