Growth of copper nanocrystallites on copper seed cones: Evidence for the presence of a liquid phase on an ion‐impacting cone surface
作者:
F. Okuyama,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 2
页码: 768-771
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.588712
出版商: American Vacuum Society
关键词: MOLYBDENUM;COPPER;ARGON IONS;SPUTTERING;CRYSTAL GROWTH;Mo;Cu
数据来源: AIP
摘要:
The Ar+‐sputter‐induced ‘‘cone evolution’’ on Mo‐seeded Cu is known to entail the growth of hillocklike crystallites on the cone surface. Such crystallites have now been identified as Cu, by means of high‐resolution energy dispersive x‐ray analysis. The Cu crystallites grew selectively on the Mo lattice of seed layers, and sometimes at the seed‐layer apex which suffered from head‐on ion impact during sputtering. The crystallite growth was thus not a direct consequence of ion impact, leading to a hypothesis that a viscous overlayer of Cu on the growing Mo lattice condensed into dewdroplike crystallites upon switching off the ion beam.
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