Evaluation of the arsenic dimer structure of an arsenic stabilized gallium arsenide surface by coaxial impact collision ion scattering spectroscopy
作者:
Naoharu Sugiyama,
Akihiro Hashimoto,
Masao Tamura,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1992)
卷期:
Volume 10,
issue 1
页码: 29-32
ISSN:0734-2101
年代: 1992
DOI:10.1116/1.578146
出版商: American Vacuum Society
关键词: GALLIUM ARSENIDES;DIMERS;ARSENIC;SURFACE ANALYSIS;SURFACE COLLISIONS;INCIDENCE ANGLE;SURFACE STRUCTURE;ION COLLISIONS;MOLECULAR BEAM EPITAXY;NEON IONS;GaAs;As2
数据来源: AIP
摘要:
Coaxial impact collision ion scattering spectroscopy (CAICISS) has been applied to an analysis of As‐stabilized GaAs surfaces. CAICISS spectral changes were observed, depending on the incident beam angle to the crystal surface. The shadow cone radius of Ga atoms in the GaAs crystal was obtained from the angular dependence of the signal intensities. The atom positions of As atoms on the top surface are also discussed on the basis of the result that the distance between the dimer atoms is shortened by less than 10% from the normal lattice constant.
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