Planar disorder‐ and native‐oxide‐defined photopumped AlAs–GaAs superlattice minidisk lasers
作者:
E. I. Chen,
N. Holonyak,
M. J. Ries,
期刊:
Journal of Applied Physics
(AIP Available online 1996)
卷期:
Volume 79,
issue 11
页码: 8204-8209
ISSN:0021-8979
年代: 1996
DOI:10.1063/1.362460
出版商: AIP
数据来源: AIP
摘要:
Data are presented on the photopumped laser operation of planar AlAs–GaAs superlattice (SL) minidisk lasers. The SL minidisk (70 A˚ AlAs, 30 A˚ GaAs; 100 periods; ∼37 &mgr;m diameter) is defined by impurity‐induced layer disordering (IILD), followed by wet oxidation (N2+H2O vapor, 400 °C which surrounds the minidisk with a low‐refractive‐index AlGaAs oxide. The planar minidisks exhibit laser operation at &lgr;∼7540 A˚, with wider mode separation (&Dgr;&lgr;∼13 A˚) than disks defined by only IILD (a smaller refractive index step) and cleaved sample edges. The mode separation of &Dgr;&lgr;∼13 A˚ corresponds to disk modes that utilize the perimeter of the oxide‐defined disks. In the fabrication of the SL minidisks, IILD forms a structural and doping difference beyond the disk perimeter that acts, in effect, as ap–njunction during etching or wet oxidation. Etch profiles are shown demonstrating this behavior. ©1996 American Institute of Physics.
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