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Oxygen Content of Silicon Single Crystals

 

作者: W. Kaiser,   P. H. Keck,  

 

期刊: Journal of Applied Physics  (AIP Available online 1957)
卷期: Volume 28, issue 8  

页码: 882-887

 

ISSN:0021-8979

 

年代: 1957

 

DOI:10.1063/1.1722880

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The oxygen content of pulled silicon crystals, determined by vacuum fusion gas analysis, is correlated with the infrared absorption at 9 &mgr;. In vacuum and in helium or hydrogen of 1 atmos, the oxygen concentration of a liquid zone of silicon (about 20 mm2in cross section) can be rapidly decreased. In an oxygen atmosphere or in contact with quartz, liquid silicon picks up oxygen quite readily. A maximum oxygen content of 2×1018oxygen atoms per cm3was observed. Silicon single crystals pulled from a quartz crucible exhibit fluctuations in oxygen concentration both perpendicular and parallel to the pulling direction. Explanations of these effects are offered and the influence of various pulling parameters is discussed.

 

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