Oxygen Content of Silicon Single Crystals
作者:
W. Kaiser,
P. H. Keck,
期刊:
Journal of Applied Physics
(AIP Available online 1957)
卷期:
Volume 28,
issue 8
页码: 882-887
ISSN:0021-8979
年代: 1957
DOI:10.1063/1.1722880
出版商: AIP
数据来源: AIP
摘要:
The oxygen content of pulled silicon crystals, determined by vacuum fusion gas analysis, is correlated with the infrared absorption at 9 &mgr;. In vacuum and in helium or hydrogen of 1 atmos, the oxygen concentration of a liquid zone of silicon (about 20 mm2in cross section) can be rapidly decreased. In an oxygen atmosphere or in contact with quartz, liquid silicon picks up oxygen quite readily. A maximum oxygen content of 2×1018oxygen atoms per cm3was observed. Silicon single crystals pulled from a quartz crucible exhibit fluctuations in oxygen concentration both perpendicular and parallel to the pulling direction. Explanations of these effects are offered and the influence of various pulling parameters is discussed.
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