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THE DETECTION OF OIL OR MERCURY ON SURFACES IN VACUUM SYSTEMS USING AN ELLIPSOMETER

 

作者: R. W. Fane,   W. E. J. Neal,   R. M. Rollason,  

 

期刊: Applied Physics Letters  （AIP Available online 1968）
卷期: Volume 12, issue 8  

页码: 265-266

 

ISSN:0003-6951

 

年代: 1968

 

DOI:10.1063/1.1651985

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The application of an ellipsometer to the detection of oil or mercury contamination of surfaces in vacuum systems is discussed. Tables giving instrument readings for these contaminants on appropriate substrates illustrate the feasibility of the technique.

 

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