Luminescence study of rapid thermal annealing of ion implantation damage in cadmium telluride
作者:
K. M. James,
J. L. Merz,
C. E. Jones,
期刊:
Journal of Applied Physics
(AIP Available online 1986)
卷期:
Volume 60,
issue 10
页码: 3699-3710
ISSN:0021-8979
年代: 1986
DOI:10.1063/1.337579
出版商: AIP
数据来源: AIP
摘要:
The results of photoluminescence analysis of ion‐implanted and flash‐annealed CdTe are reported here. Bound exciton lines in the spectrum of the CdTe were used to study the annealing of implantation‐induced damage in the crystal. The intensity and width of these lines are a very good indicator of variations in lattice strain. Optimum flash annealing conditions were found to depend on both the energy and the dose of the implant. The photoluminescence indicates that flash annealing can provide complete annealing of the crystal damage following implantation. Implanting Cu or B ions into the lattice did not, however, lead to significant variations in the spectrum of the samples as compared to annealed, unimplanted samples. A comparison of flash and furnace annealing was made.
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