Nanocrystalline thin films of different relaxor materials, namely Pb(Sc0.5Ta0.5)O3(PST), Pb(Sc0.5Nb0.5)O3(PSN), Pb(Mg1/3Nb2/3)O3(PMN) have been produced by RF-sputtering to investigate whether it will affect their dielectric properties if their grain size is reduced to the dimensions known from their nanodomains. The XRD shows that the amorphous film crystallizes in pyrochlore structure at lower temperatures and short times. Annealing at higher temperatures and far longer time intervals leads to an increasing amount of perovskite phase with a grain size in the nanometer range. These results including dielectric measurements will be presented and discussed.