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Comparison of diamondlike coatings deposited with C+and various hydrocarbon ion beams

 

作者: A. Anttila,   J. Koskinen,   R. Lappalainen,   J‐P. Hirvonen,   D. Stone,   C. Paszkiet,  

 

期刊: Applied Physics Letters  （AIP Available online 1987）
卷期: Volume 50, issue 3  

页码: 132-134

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.97693

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The mechanical properties of the diamondlike coatings deposited with mass‐separated C+, CH+3, CH+4, and C2H+2ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

 

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