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Interpretation of double‐crystal x‐ray rocking curves in relaxed strained‐layer structures

 

作者: M. A. Lourenc¸o,   D. J. Dunstan,  

 

期刊: Journal of Applied Physics  (AIP Available online 1996)
卷期: Volume 79, issue 6  

页码: 3011-3015

 

ISSN:0021-8979

 

年代: 1996

 

DOI:10.1063/1.361295

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Double‐crystal x‐ray rocking curves from metamorphic epitaxial heterostructures are broadened by the presence of misfit dislocations and this vitiates the usual interpretation of rocking curves using simulation software. However, analysis of the moments of the rocking curve can be useful. Using single layers, we show that the first moment is equivalent to the peak splitting, so that the average strain and average composition of an inhomogeneous layer can be derived from its first moments. The usefulness of the method is demonstrated on complicated heterostructures including graded layers. ©1996 American Institute of Physics.

 

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