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Installation and early operating experience with the Helios compact synchrotron x‐ray source

 

作者: C. N. Archie,   J. I. Granlund,   R. W. Hill,   K. W. Kukkonen,   J. A. Leavey,   L. G. Lesoine,   J. M. Oberschmidt,   A. E. Palumbo,   C. Wasik,   M. Q. Barton,   J. P. Silverman,   J. M. Warlaumont,   A. D. Wilson,   R. J. Anderson,   N. C. Crosland,   A. R. Jorden,   V. C. Kempson,   J. Schouten,   A. I. C. Smith,   M. C. Townsend,   J. Uythoven,   M. C. Wilson,   M. N. Wilson,   D. E. Andrews,   R. Palmer,   R. Webber,   A. J. Weger,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1992）
卷期: Volume 10, issue 6  

页码: 3224-3228

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.585918

 

出版商: American Vacuum Society

 

关键词: SYNCHROTRON RADIATION SOURCES;OPERATION;RELIABILITY;STORAGE RINGS;CONSTRUCTION;LITHOGRAPHY

 

数据来源: AIP

 

摘要:

During 1991 the Oxford Instruments’ compact synchrotron x‐ray source Helios was installed at IBM’s Advanced Lithography Facility, following factory tests in Oxford during 1990. The machine has met or exceeded all performance specifications at the East Fishkill site. Since January, 1992 it has been run routinely for lithography development work. Running and reliability statistics are being generated, and the results for the first five months are presented here.

 

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