A new self‐aligned subtractive gate process for high‐voltage and complementary polycrystalline silicon thin‐film transistors
作者:
I‐Wei Wu,
Tiao‐Yuan Huang,
Alan G. Lewis,
T. C. Chuang,
Anne Chiang,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 68,
issue 9
页码: 4900-4902
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.346125
出版商: AIP
数据来源: AIP
摘要:
A new self‐aligned subtractive gate process is proposed by alternating several masking and polycrystalline silicon gate etching steps from a conventional process to build high‐voltage (up to 100 V) and complementary thin‐film transistors (TFT) on insulating substrates. The new process is compatible with conventional TFT mask sets and standard processing techniques. The advantage of using this new process is to eliminate the difficulty in stripping photoresist on insulating substrates after high‐dose phosphorus implant and to improve the off‐state breakdown voltage in high‐voltage transistors. Complementary metal‐oxide‐semiconductor and high‐voltage TFT devices were successfully fabricated by this new process.
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