Ion energy and mass analyzer at radio frequency electrode in a plasma chamber
作者:
Naoki Mizutani,
Yasushi Nagata,
Akira Kubo,
Toshio Hayashi,
期刊:
Review of Scientific Instruments
(AIP Available online 1998)
卷期:
Volume 69,
issue 4
页码: 1918-1919
ISSN:0034-6748
年代: 1998
DOI:10.1063/1.1148865
出版商: AIP
数据来源: AIP
摘要:
There are two modes for ion energy analysis at a rf electrode in a plasma chamber. One is a dc mode in which the electric potential of the ion energy analyzer is constant in time, and another is a rf mode in which the electric potential of the analyzer oscillates with same frequency, amplitude, and phase as that of the rf electrode. For correct ion energy analysis at the rf electrode, the rf mode is necessary. For ion mass analysis in the rf mode, the electric potential of the ion mass analyzer also must oscillate. We fabricated such an ion energy and mass analyzer, and confirmed its performance. ©1998 American Institute of Physics.
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