Laser-assisted low temperature processing ofPb(Zr, Ti)O3thin film
作者:
Yongfei Zhu,
Jinsong Zhu,
Yoon J. Song,
S. B. Desu,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 73,
issue 14
页码: 1958-1960
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.122334
出版商: AIP
数据来源: AIP
摘要:
A method for lowering the processing temperature ofPbZr1−xTixO3(PZT) films was developed utilizing a laser-assisted two-step process. In the first step, perovskite phase was initiated in the PZT films to a furnace anneal at low temperatures in the range of 470–550 °C, depending on the Zr/Ti ratio. Later, the films were laser annealed (using KrF excimer laser) at room temperature to grow the perovskite phase, and to improve microstructure and ferroelectric properties. It was found that this two-step process was very effective in producing excellent quality ferroelectric PZT films at low temperatures. It should be noted that although laser annealing of amorphous and/or pyrochlore films directly (one-step process) produced perovskite phase, the ferroelectric properties of these films, irrespective of the composition, were rather unattractive. Some possible reasons for the ineffectiveness of the one-step process were discussed. ©1998 American Institute of Physics.
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