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Optical behavior of sputter‐deposited platinum‐oxide films

 

作者: Carolyn Rubin Aita,  

 

期刊: Journal of Applied Physics  (AIP Available online 1985)
卷期: Volume 58, issue 8  

页码: 3169-3173

 

ISSN:0021-8979

 

年代: 1985

 

DOI:10.1063/1.335823

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A series of platinum‐oxygen alloys were grown by sputter deposition using a platinum target and rf‐excited, oxygen‐bearing discharges. The films were deposited on water‐cooled single‐crystal silicon and glass substrates. Optical behavior in the near‐ultraviolet–visible–near‐infrared region was studied by spectrophotometry. Changes in reflection and transmission were correlated with changes in film chemistry and structure. The absorption coefficient and two‐infrared optical transitions across the band gap were determined for a semiconducting Pt‐oxide phase, identified by x‐ray photoelectron spectroscopy as &agr;‐PtO2. These transitions occur at 1.30 eV (0.95 &mgr;m) and 1.47 eV (0.84 &mgr;m).

 

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