Preparation, microstructure, and ferroelectric properties of laser-deposited thin BaTiO3and lead zirconate-titanate films
作者:
P.S. Brody,
B.J. Rod,
K.W. Bennett,
L.P. Cook,
P.K. Schenck,
M.D. Vaudin,
W Wong-Ng,
C.K. Chiang,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1992)
卷期:
Volume 1,
issue 2-4
页码: 239-251
ISSN:1058-4587
年代: 1992
DOI:10.1080/10584589208215715
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Ferroelectric thin films of BaTiO3and lead zirconate titanate, PbZr0.53Ti0.47O3(PZT), have been prepared by pulsed excimer laser deposition. The microstructure and crystallography of these films have been studied by scanning electron microscopy (SEM), energy dispersive x-ray spectrometry (EDX), transmission electron microscopy (TEM), x-ray diffraction (XRD), and differential scanning calorimetry (DSC). Electrical properties, including remanent polarization, dielectric loss, and dielectric constant, have been measured. Also, switched remanent polarization has been measured under conditions of continuous cycling.
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