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Pulsed‐laser deposition of smooth high‐Tcsuperconducting films using a synchronous velocity filter

 

作者: E. V. Pechen,   A. V. Varlashkin,   S. I. Krasnosvobodtsev,   B. Brunner,   K. F. Renk,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 17  

页码: 2292-2294

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113264

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Pulsed‐laser deposition of smooth high‐Tcsuperconducting films almost free from droplets and precipitates with the use of velocity filtration of plasma particles is reported. We have removed droplets from laser‐induced plasma by using a shutter technique; a reduction of the droplet density by a factor of 105has been achieved. We have applied the technique to the preparation of high quality YBa2Cu3O7−&dgr;films on (100)‐oriented SrTiO3, MgO, Y2O3‐stabilized ZrO2(YSZ) substrates and, furthermore, on (11¯02)‐oriented sapphire covered with (100) sublayers of Si and (100) YSZ buffer layers. ©1995 American Institute of Physics.

 

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