Pulsed‐laser deposition of smooth high‐Tcsuperconducting films using a synchronous velocity filter
作者:
E. V. Pechen,
A. V. Varlashkin,
S. I. Krasnosvobodtsev,
B. Brunner,
K. F. Renk,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 17
页码: 2292-2294
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113264
出版商: AIP
数据来源: AIP
摘要:
Pulsed‐laser deposition of smooth high‐Tcsuperconducting films almost free from droplets and precipitates with the use of velocity filtration of plasma particles is reported. We have removed droplets from laser‐induced plasma by using a shutter technique; a reduction of the droplet density by a factor of 105has been achieved. We have applied the technique to the preparation of high quality YBa2Cu3O7−&dgr;films on (100)‐oriented SrTiO3, MgO, Y2O3‐stabilized ZrO2(YSZ) substrates and, furthermore, on (11¯02)‐oriented sapphire covered with (100) sublayers of Si and (100) YSZ buffer layers. ©1995 American Institute of Physics.
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