We study the magnetic properties of Fe thin films epitaxially grown on GaAs (001) for a large range of substrate temperature. Magnetization deficiency has been observed and studied. Its dependence on both thickness and temperature clearly show the existence of a nearly half-magnetized phase at the interface, covered by “as-bulk” Fe. Furthermore, reflection high-energy electron diffraction studies show a transition between two bcc structures with different crystalline parameters. Transmission electron microscopy confirms the formation of this interfacial phase, for which the compoundFe3Ga2−xAsxseems to be the best candidate. ©1997 American Institute of Physics.