Anodic oxide metal–insulator–semiconductor structures onn‐type InSb
作者:
C. W. Chen,
D. L. Lile,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 5
页码: 1122-1125
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584562
出版商: American Vacuum Society
关键词: METAL−INSULATOR CONTACTS;SORPTIVE PROPERTIES;MIS JUNCTIONS;INDIUM ANTIMONIDES;PHOSPHORIC ACID;CITRIC ACID;ELECTROLYTES;FABRICATION;INTERFACE STATES;InSb
数据来源: AIP
摘要:
Anodic oxide metal–insulator–semiconductor (MIS) structures have been prepared on (100)‐ and (111)B‐oriented samples ofn‐type InSb using either phosphoric or citric acid as the electrolyte. Interface properties have been evaluated using 1‐MHz capacitance–voltage (C–V) measurements as a function of temperature from ∼20 to 300 K. By comparing interface state density and fixed charge with preparation conditions for the dielectric, it is concluded that the data are consistent with the presence of elemental Sb at the interface, which acts as a hole trap.
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