首页   按字顺浏览 期刊浏览 卷期浏览 Evaluation of doping profiles in ion‐implanted PbTe
Evaluation of doping profiles in ion‐implanted PbTe

 

作者: L. Palmetshofer,   E. Vierlinger,   H. Heinrich,   L. D. Haas,  

 

期刊: Journal of Applied Physics  (AIP Available online 1978)
卷期: Volume 49, issue 3  

页码: 1128-1130

 

ISSN:0021-8979

 

年代: 1978

 

DOI:10.1063/1.325050

 

出版商: AIP

 

数据来源: AIP

 

摘要:

From measurements of the sheet conductivity and the Hall effect in combination with layer stripping by chemical etching, we have evaluated the doping profiles of ion‐implanted PbTe. By using thin films grown epitaxially on insulating substrates, we avoided difficulties with the formation of an insulatingp‐njunction. The carrier profiles of samples implanted in a random direction are deeper and broader than those of the LSS theory. The charge‐carrier profiles associated with the implantation damage show a constant value of the maximum concentration largely independent of the implantation dose and the ions used.

 

点击下载:  PDF (190KB)



返 回