Optical spectroscopic study of mechanisms in CCl4plasma etching of Si
作者:
P. E. Clarke,
D. Field,
D. F. Klemperer,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 3
页码: 1525-1534
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.345663
出版商: AIP
数据来源: AIP
摘要:
The emission of Si, SiCl, Cl, Cl2, CCl, Cl+, and Cl+ 2has been observed in a CCl4rf discharge in the presence of Si(100) in a plasma etching system. Spectral intensities have been recorded over a wide range of process gas flow rates and rf powers. These data have been analyzed to show that (i) SiCl emission from theA˜ state arises through chemiluminescent reactions of metastable (1S) Si and (ii) the species which leaves the Si surface in the etching process is SiClx(x=0, 1, or 2) rather than SiCl3or SiCl4. To arrive at these conclusions, detailed chemical models are examined and shown quantitatively to reproduce our observed variations of emission with flow and power.
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