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Procedure for electron and ion lens optimization

 

作者: M. Szilagyi,   S. J. Yakowitz,   M. O. Duff,  

 

期刊: Applied Physics Letters  （AIP Available online 1984）
卷期: Volume 44, issue 1  

页码: 7-9

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.94559

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This letter describes a computational technique for optimal control problems arising in the synthesis of electron and ion lenses. The method provides an effective search algorithm for electrostatic and/or magnetic imaging fields with minimum aberrations. An optimized electrostatic field distribution is given as an example of application.

 

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