The role of absorption in x‐ray diffraction measurements from epitaxial layers and substrates
作者:
Andrew W. Stevenson,
Geoff N. Pain,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 68,
issue 2
页码: 569-573
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.346808
出版商: AIP
数据来源: AIP
摘要:
The role of normal absorption in x‐ray diffraction measurements of integrated Bragg intensities from epitaxial (or other) layers and their associated substrates is discussed in terms of the transmission factor. It is shown that the technique for the determination of the polarity of an epitaxial layer by means of anomalous scattering of x rays need not be limited to the case of an effectively infinite layer thickness, in Bragg geometry. Some discussion of layer‐thickness determination is also given.
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