Studies of nucleation and growth morphology of boron‐doped diamond microcrystals by scanning tunneling microscopy
作者:
M. P. Everson,
M. A. Tamor,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 1570-1576
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585426
出版商: American Vacuum Society
关键词: DIAMONDS;DOPED MATERIALS;BORON ADDITIONS;CHEMICAL VAPOR DEPOSITION;MICROWAVE RADIATION;NUCLEATION;MORPHOLOGY;SCANNING TUNNELING MICROSCOPY;WORK FUNCTIONS;THIN FILMS;C:B;MICROCRYSTALS
数据来源: AIP
摘要:
We report on a study of nucleation and growth morphology of diamond microcrystals formed by microwave enhanced chemical vapor deposition. By doping diamonds with boron, sufficient conductivity is achieved that they may be directly imaged by scanning tunneling microscopy with near‐atomic resolution. We demonstrate the first application of work function anddI/dVimaging of diamond. These techniques offer the ability to identify nuclei too small to be recognized by their characteristic cubo‐octahedral shape, and may enable identification of nucleation sites before diamond growth begins.
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