首页   按字顺浏览 期刊浏览 卷期浏览 Kinematic theory of ballistic electron emission spectroscopy of silicon–silicide interf...
Kinematic theory of ballistic electron emission spectroscopy of silicon–silicide interfaces

 

作者: M. D. Stiles,   D. R. Hamann,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1991)
卷期: Volume 9, issue 4  

页码: 2394-2398

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585709

 

出版商: American Vacuum Society

 

关键词: COBALT SILICIDES;NICKEL SILICIDES;INTERFACES;ELECTRON SPECTROSCOPY;BALLISTICS;ELECTRON MICROSCOPY;ELECTRON EMISSION;ELECTRONIC STRUCTURE;CONDUCTION BANDS;ENERGY−LEVEL DENSITY;CoSi;NiSi;Si

 

数据来源: AIP

 

摘要:

The electronic structure of the materials being measured has a strong effect on the spectroscopy of the interface between them measured by ballistic electron emission microscopy (BEEM). Specific calculations for CoSi2/Si(111) and NiSi2/Si(111) based on the calculated band structures of the materials illustrate some of the observable effects due to band structures, particularly of the overlayer. The BEEM spectra for CoSi2/Si(111) show a delayed onset due to a mismatch of the states near the conduction band minimum in the Si. The spectra for NiSi2/Si(111) show structure due to a decrease in the density of states in the NiSi2at ∼1.8 eV above the Fermi level.

 

点击下载:  PDF (547KB)



返 回