Superconducting Tl2Ba2CaCu2Oxfilms were fabricated using a three‐step process. Amorphous BaCaCuOF films were deposited on MgO(100) single‐crystal substrates by metalorganic chemical vapor deposition at 500 °C using fluorinated &bgr;‐diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 °C andc‐axis oriented Tl2Ba2CaCu2Oxfilms were then formed by annealing in dry at 870 °C in the presence of Tl2O3/Ba2Ca2CuN3Oxpellets. The best films showed onsets of superconductivity at 125 K and zero resistivity was achieved by 108 K. Critical current densities as high as 104A/cm2were obtained at 90 K.