Optical emission spectroscopy of rf discharge in SF6
作者:
S. B. Radovanov,
B. Tomcˇik,
Z. Lj. Petrovic´,
B. M. Jelenkovic´,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 1
页码: 97-107
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.345211
出版商: AIP
数据来源: AIP
摘要:
In this paper we present experimental results obtained for a rf discharge in SF6and for SF6with Ar and/or N2. The data for power dependence of some emission lines usually used in actinometry are acquired and their applicability and excitation kinetics discussed. We also present the spatial (time averaged) variations of some emission lines. From such data the spatial dependence of the high‐energy tail of the electron energy distribution function may be obtained.
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