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High accuracy quartz crystal thin film monitor

 

作者: B. Ramadan,   K. Piyakis,   J. F. Kos,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1979）
卷期: Volume 50, issue 7  

页码: 867-871

 

ISSN:0034-6748

 

年代: 1979

 

DOI:10.1063/1.1135941

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A quartz resonator thin film monitor of exceptionally high accuracy and resolution has been developed. It is capable of providing measurements with an effective resolution of 0.001 nm and a corresponding relative accuracy of about 1% for a 0.100‐nm‐thick film of gold. A novel dual oscillator and mixer using integrated circuits is also described.

 

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