The pearson IV distribution and its application to ion implanted depth profiles
作者:
RobertG. Wilson,
期刊:
Radiation Effects
(Taylor Available online 1980)
卷期:
Volume 46,
issue 3-4
页码: 141-147
ISSN:0033-7579
年代: 1980
DOI:10.1080/00337578008209163
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The Pearson IV distribution system is analyzed to determine the regions of validity for the values of the moments that produce convex, concave, more pointed than Gaussian, and more flat-topped than Gaussian distributions; the limits beyond which no significant change in distribution is produced; and excluded regions. These regions are illustrated in a figure that can be used to facilitate the determination of the Pearson IV moments for experimental ion implanted depth distributions. Examples are given of Pearson IV distributions to illustrate the effects of the ranges of skewness, kurtosis, and standard deviation, for both more pointed and more flat-topped than Gaussian distributions. A procedure is described for matching experimental ion implanted depth distributions to computer plotted Pearson IV modified Gaussian distributions. A few experimental curves are given to illustrate the different types of Pearson IV curves, and accuracies of moments are discussed.
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