Fast computer‐controlled deep level transient spectroscopy system for versatile applications in semiconductors
作者:
K. Ho¨lzlein,
G. Pensl,
M. Schulz,
P. Stolz,
期刊:
Review of Scientific Instruments
(AIP Available online 1986)
卷期:
Volume 57,
issue 7
页码: 1373-1377
ISSN:0034-6748
年代: 1986
DOI:10.1063/1.1138603
出版商: AIP
数据来源: AIP
摘要:
A fast computer‐controlled and fully automated deep level transient spectroscopy (DLTS) system is described. Various DLTS techniques can be operated without changing the hardware. Simultaneous data acquisition and data processing considerably reduces the measurement time. The sensitivity of the system is increased by digital compensation of the sample capacitance and by averaging of a high number of transients. All the trap parameters are determined during one temperature scan.
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