Energy dependence of amorphizing implant dose in silicon
作者:
John R. Dennis,
Edward B. Hale,
期刊:
Applied Physics Letters
(AIP Available online 1976)
卷期:
Volume 29,
issue 9
页码: 523-524
ISSN:0003-6951
年代: 1976
DOI:10.1063/1.89170
出版商: AIP
数据来源: AIP
摘要:
The radiation‐induced transformation from crystalline to amorphous silicon was studied using ion implantation. The ion energy was varied from 20 to 180 keV for Li+, N+, Ne+, Ar+, and Kr+. The energy dependence of the critical amorphizing dose was determined by electron spin resonance. Comparison of the data with theoretical calculations of the energy density deposited into atomic processes showed good agreement. This energy‐dependent agreement gave evidence that energy density is important to the transformation at both low and high implantation temperatures.
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