GaAs/AlGaAs multiquantum well infrared detector arrays using etched gratings
作者:
G. Hasnain,
B. F. Levine,
C. G. Bethea,
R. A. Logan,
J. Walker,
R. J. Malik,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 25
页码: 2515-2517
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101079
出版商: AIP
数据来源: AIP
摘要:
Efficient coupling of long‐wavelength infrared (LWIR) radiation to a two‐dimensional (2‐D) array of GaAs/AlGaAs multiple quantum well detectors is achieved by illumination through chemically etched diffraction gratings. Gratings were fabricated on the back surface of the GaAs substrate as well as selectively on the top contact of the detector mesas. Both top and bottom illumination schemes were employed. In all cases, high coupling efficiency (>90%) of the gratings was observed as measured by comparing the responsivity to that of an identical detector illuminated through an angle‐polished facet. The results demonstrate the feasibility of high‐sensitivity GaAs LWIR imagers.
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