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A general model for fabrication processes of channel waveguides by ion exchange

 

作者: Ari Tervonen,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 67, issue 6  

页码: 2746-2752

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.345440

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A general theoretical approach to the modeling of several different process steps in fabrication of ion‐exchanged channel waveguides is presented. All of the commonly used fabrication processes are included, and the nature of the ion source and the effect of external electric voltage are taken into account. The model uses a numerical finite‐difference calculation of diffusion in the glass with boundary conditions and electrical current distribution chosen according to the process being modeled. A single computer program includes the model, and can be used for simulating a fabrication process with different successive process steps. Several calculated examples are given, all with experimentally obtained parameters for Ag+‐Na+exchange in Corning 0211 glass.

 

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