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Direct bonding of quartz crystal onto silicon

 

作者: Kazuo Eda,   Akihiro Kanaboshi,   Tetsuyoshi Ogura,   Yutaka Taguchi,  

 

期刊: Journal of Applied Physics  （AIP Available online 1993）
卷期: Volume 74, issue 7  

页码: 4801-4802

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354328

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new method to bond a quartz crystal onto a silicon substrate, fabricating a quartz‐crystal‐on‐silicon resonator, is reported together with its fabrication process, interface microstructure, and resonant characteristics. A one‐chip quartz crystal oscillator employing the quartz‐crystal‐on‐silicon resonator for mobile communication is also suggested.

 

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