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Emission measurements and simulation of silicon field‐emitter arrays with linear planar lenses

 

作者: Cha‐Mei Tang,   T. A. Swyden,   K. A. Thomason,   L. N. Yadon,   D. Temple,   C. A. Ball,   W. D. Palmer,   J. E. Mancusi,   D. Vellenga,   G. E. McGuire,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 6  

页码: 3455-3459

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588779

 

出版商: American Vacuum Society

 

关键词: Si

 

数据来源: AIP

 

摘要:

Results of beam collimation experiments on linear field‐emitter arrays with linear planar lenses are summarized. The electron beam is imaged on a phosphor screen. In general, as lens voltage is reduced relative to the gate voltage, the elliptically shaped screen images narrow, becoming fine lines with emission currents showing only modest reductions. This reduction of emission current can be overcome by increasing the gate voltage only a few volts without affecting beam collimation. As the lens voltage is reduced, screen current decreases relative to emission current while gate current increases, indicating that some emitted electrons in this linear lens geometry cannot propagate to the anode screen. Experimental data and qualitative modeling are in fair agreement.

 

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