Plasma polymer thin films with embedded silver particles (5‐50 nm) were irradiated by a small focussed electron beam of 10 kV. Before and after irradiation the films were investigated by transmission electron microscopy (TEM) to characterize the microstructure given by size and shape of the embedded silver particles. The changes of the microstructure after the electron beam irradiation were limited to small lines (<2 &mgr;m). Most changes were coalescence of the silver particles. Furthermore, after increased irradiation time and higher energy input areas nearly free of silver particles but without destruction of the plasma polymer matrix were found. ©1995 American Institute of Physics.